Control of plasma parameters by Penning ion effect
density distribution of plasma, density of oxygen ions, food sterilization, Pegasus simulations, Penning effect
We attempted to control the density of oxygen ions by adding argon gas and helium gas with metastable voltage to oxygen gas with ionization voltage, in order to determine the optimum combination and ratio of gases for food sterilization. Next, using Pegasus software, we performed a simulation of the density distribution of plasma in the apparatus.
Cite this article as:
Matsuda R., Kijima Y., Kakugawa K., Toyota H., Tanaka T., Vutova K. Control of plasma parameters by Penning ion effect. Journal – Electrotechnica & Electronica (E+E), Vol. 53, No. 7-8, 2018, pp. 189-193, ISSN: 0861-4717 (Print), 2603-5421 (Online)