Hydrogen Silsesquioxane (HSQ) is used as a high-resolution resist with resolution down below 10 nm half-pitch. High-contrast and high-resolution patterning in the negative electron beam HSQ resist has numerous potential applications. ...
Hydrogen Silsesquioxane (HSQ) is used as a high-resolution resist with resolution down below 10 nm half-pitch. High-contrast and high-resolution patterning in the negative electron beam HSQ resist has numerous potential applications. ...
In this paper the negative HSQ (hydrogen silsesquioxane) XR 1541 electron beam resist is investigated in terms of its performance in the e-beam lithography for chosen substrate materials, namely for silicon, Ag on Si substrates, ...
The object of the pulsed Electron beam designed in this work is to modify the surface layer of metals by melting through uniform adiabatic heating in the order of a few microseconds. With a maximum diameter of the beam 70 ...
Torr International has made many electron beams systems for many applications such as hard coating, lift off and optical applications. The electron gun employed in e beam coating is with a 270 deg bent beam, in order for the ...
Surface remelting has been used for improving the tribological behaviour of components, e.g. camshafts, for many years. Growing demands for the simultaneous improvement of wear and corrosion resistance of components with complex ...
In pulsed large-area EB irradiation method, wide area of metal surface can be instantly melted and the surface roughness can be decreased efficiently. This finishing method is already applied to metal molds. In addition, the ...
The paper presents research results on pulsed electron beam surface finish of porous metal articles obtained by selective powder sintering. On the example of VT6 alloy, it is shown that surface finish with a pulsed electron ...
By comparing the behavior of two types of 316L stainless steels under the high current pulsed electron beam (HCPEB) irradiation treatment, it is demonstrated experimentally that the burst of eruptive craters through the surface ...
The paper presents the method of electron beam vacuum evaporation and condensation for the most promising technologies of manufacturing modern composite materials, used in welding and switching equipment. This method currently ...
In this study corrosion resistance of the coatings obtained on VТ14 (4% Al, 3% Mo, Ti – the rest) titanium alloy substrates using focused electron beam with an energy of 1.4 MeV injected into the atmosphere was discussed. ...
2012-2023