Thin films

Optical and Structural Investigations of WOx Thin Films Deposited by Electron Beam Evaporation Process

Thin films of tungsten oxide are obtained at different technological parameters using electron beam evaporation process. Their optical and structure properties are investigated and the relation with process parameters is discussed. ...  read more

Surface Engineering Improvements and Opportunities with Electron Beams

Recent developments at TWI in electron beam technology demonstrate how an electron beam used at lower power may be employed for a variety of purposes including a novel process, Surfi-Sculpt®. Surfi-Sculpt can neither be described as ...  read more

Surface Layer Modification by Large-Area Pulsed Electron Beams

In liquid metal technology, steel corrosion is a well-known problem. Dissolution of alloying elements into the liquid metal is prevented by the formation of a protective oxide layer on the steel surface. However, in high temperature ...  read more

Electron Beam Heat Treatment of Aircraft Engine Combustion Chamber Casings, Made of Precipitation-Hardened Heat- Resistant Chrome Nickel Alloys

Electron beam age hardening at repair of combustion chamber made of heat-resistant chrome nickel alloys is studied. At replacing old flange with a new one (welded by electron beam) furnace heat treatment in terms of age hardening is ...  read more

Composite Materials with Metal Matrix Condensed from Vapor Phase: Microporous Materials

The basic factors that affect the physical and mechanical properties of microporous material, pore volume and pore size therein. The main factors that affect the physical and mechanical properties of the microporous material, pore volume and pore size were evaluated.

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Composite Materials with Metal Matrix Condensed from Vapor Phase: Microlayer Materials

The problems of microlayer metal materials, obtained by condensation from vapor phase are discussed. Example of copper-molybdenum materials obtaining was first shown possibility to produce composites having a layer thickness of less ...  read more

Composite Materials with a Metal Matrix Condensed from Vapor Phase: Dispersion-Strengthened Metals

Modern scientific level of dispersion-strengthened metals condensed from the vapor phase engineering is presented. The physical and mechanical properties of these materials depend on selected matrix type (pure metal, metal alloy), particles ...  read more

Gas discharge electron sources – Proven and novel tools for thin-film technologies

Gas discharge-based electron sources represent high-power and low-cost tools for a variety of processes regularly required in vacuum high-rate coating. Here, the fields of substrate pre-treatment, electron beam generation for materials ...  read more

Resist characteristics simulation of HSQ electron beam resist

Hydrogen Silsesquioxane (HSQ) is used as a high-resolution resist with resolution down below 10 nm half-pitch. High-contrast and high-resolution patterning in the negative electron beam HSQ resist has numerous potential applications. ...  read more

Performance of the XR 1541 negative e-beam resist in the e-beam lithography for chosen substrate materials

In this paper the negative HSQ (hydrogen silsesquioxane) XR 1541 electron beam resist is investigated in terms of its performance in the e-beam lithography for chosen substrate materials, namely for silicon, Ag on Si substrates, and ...  read more