We used the PBII (Plasma Based Ion Implantation) method with self-igniting plasma and negative high-voltage pulsed power supply only to calculate the ion density inside a formed ion sheath based on a modulation circuit, by ...
We used the PBII (Plasma Based Ion Implantation) method with self-igniting plasma and negative high-voltage pulsed power supply only to calculate the ion density inside a formed ion sheath based on a modulation circuit, by ...