Yoshito Shirai

20140506-59
Estimation of Self-Ignited Plasma Density Using Plasma-Based Ion Implantation
Nobuyuki Fujimura, Kazuhiro Shimono, Hiromitsu Noguchi, Hiroshi Toyota, Yoshito Shirai, Takeshi Tanaka

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Plasma density is estimated from the target voltage and current characteristics of the pulse modulator circuit in plasma-based ion implantation. The voltage recovery time constant directly reflects the ion sheath characteristics, ...  read more

20140506-57
Comparison of Plasma Spectral Characteristics Using a Plasma- Based Ion Implantation
Hiromitsu Noguchi, Nobuyuki Fujimura, Kazuhiro Shimono, Hiroshi Toyota, Yoshito Shirai and Takeshi Tanaka

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Plasma-based ion implantation is a recently developed technique used to modify the surface of materials by immersion in plasma coupled with the application of a negative bias voltage.

In this study, we compare the properties ...  read more

20140506-56
Preliminary Estimation of Incident Ion Energy by Using Simulation Software (PEGASUS)
Hideaki Kozai, Nobuyuki Fujimura, Mitsuhiro Noguchi, Hiroshi Toyota, Yoshito Shirai, Takeshi Tanaka, Katia Vutova

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Plasma base ion implantation (PBII) with self-ignited plasma generated by only pulsed voltages to the test specimen has been applied to the sterilization process. We found that the PBII process reduced the numbers of active ...  read more

20140506-55
Pulse Width Dependence of the Self-Ignited Plasma Using a Plasma-Based Ion Implantation
Kazuhiro Shimono, Nobuyuki Fujimura, Hiromitsu Noguchi, Hiroshi Toyota, Yoshito Shirai, Takeshi Tanaka, Katia Vutova

Cite as:

Plasma based ion implantation (PBII) with high negative pulsed voltage applied to the test specimen has been applied to the sterilization process as a technique suitable for three-dimensional work pieces. We found that the ...  read more