Preliminary simulation of Magnetron sputtering using Pegasus software
Hitoshi Suizu, Ryota Matsuda, Tomonori Tabe, Hiroshi Toyota, Takeshi Tanaka

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In an r.f.-d.c. coupled magnetron sputtering system, the magnetron discharge was generated by a 13.56 MHz r.f. source, and a d.c. power was simultaneously applied to a tin target through a low-pass filter in order to control ...  read more