This study considers the issue of higher probe contact resistance associated with oxidation of Al attached to the probe surface. In an experiment involving Al electrodes, there was virtually no increase in contact resistance ...
This study considers the issue of higher probe contact resistance associated with oxidation of Al attached to the probe surface. In an experiment involving Al electrodes, there was virtually no increase in contact resistance ...
In an r.f.-d.c. coupled magnetron sputtering system, the magnetron discharge was generated by a 13.56 MHz r.f. source, and a d.c. power was simultaneously applied to a tin target through a low-pass filter in order to control ...