Preliminary Estimation of Incident Ion Energy by Using Simulation Software (PEGASUS)
Hideaki Kozai, Nobuyuki Fujimura, Mitsuhiro Noguchi, Hiroshi Toyota, Yoshito Shirai, Takeshi Tanaka, Katia Vutova

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Plasma base ion implantation (PBII) with self-ignited plasma generated by only pulsed voltages to the test specimen has been applied to the sterilization process. We found that the PBII process reduced the numbers of active ...  read more