Electron beam and ion lithography

20180304-09
Fabrication of high performance carbon nanotube cold cathode electron beam (C-beam) for various devices
Hyeon Hee Yang, Hye In Lee, Jung Su Kang, Kyu Chang Park

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We fabricated high performance cold cathode electron beam with carbon nanotube (CNT) emitters. High performance cold cathode electron emitters show more than 150 mA electron emission current and long-time operational stability. ...  read more

20180304-08
A multi column lithography system for low and medium volume mask manufacturing
Viacheslav V. Kazmiruk, Ilya G. Kurganov, Alexander A. Podkopaev, Tatiana N. Savitskaja

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In the paper is presented multicolumn e-beam lithography (MCL) system intended generally for production of templates.

The system was designed in two versions: with Schottky emitter and LaB6/CeB6 emitter.

System with Schottky ...  read more

20180304-07
Trends in the development of cobalt production
Valeriya K. Kovacheva-Ninova, Georgi M. Savov, Vania Vassileva, Katia Vutova, Evgeni Petrov, Dobrin Petrov

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Cobalt, as one of the “critical” and “strategically important” metals, plays a key role in the contemporary development of the world’s industry. Cobalt has specialized applications where it is currently impossible ...  read more

20180304-06
35 years of experience in radiation technologies innovation at the ОАО “Public Enterprise “PODOL’SKKABEL” plant
Nikolay I. Gromov, Mikhail N. Gromov, Nikolay K. Kuksanov, Alexander I. Roikh, Rustam A. Salimov

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https://epluse.ceec.bg/wp-admin/poThe technology of cable insulation radiation modifying had a wide application in the industry. The use of such a technology provided the production of a wide range of cables, wires and heat ...  read more