Gas discharge electron sources – Proven and novel tools for thin-film technologies
Goesta Mattausch, Burkhard Zimmermann, Fred Fietzke, Jens-Peter Heinß, Benjamin Graffel, Falk Winckler, Frank-Holm Roegner, Christoph Metzner

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Gas discharge-based electron sources represent high-power and low-cost tools for a variety of processes regularly required in vacuum high-rate coating. Here, the fields of substrate pre-treatment, electron beam generation ...  read more